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About SMEE
Company Profile
History
Rights/IPR
Quality System
Cooperation Concept
Products
Lithography Equipment
SSX600 Series Lithography
SSB500 Series Projection Stepper
SSB300 Series Projection Stepper
SSB200 Small Mask Series Lithography Equipment
SSB200 Large Mask Series Lithography Equipment
IC Derivative Products
SLD Series Laser Annealing Equipment
SW Series Wafer Bounding Equipment
FPD Derivative Products
Photo Alignment
TP/CD Measurement Equipment
FMM Tension Equipment
FMM Measurement Equipment
Optical Metrology and Inspection Equipment
SOI500 Series Automatic Optical Inspection Equipment
SOI600 Series Semi-Automatic Optical Inspection Equipment
SOI800 Series Automatic Optical Inspection Equipment
SOL500 CD&Overlay Metrology Equipment
SHM800 Holistic Metrology Equipment
Service & Support
Service System
Customer Training
Products & Application
IC Area
FPD Area
LED/ MEMS/ Power Devices
Company Profile
Founded in 2002, Shanghai Micro Electronics Equipment (Group) Co., Ltd. (SMEE) is dedicated to the research, design, manufacturing, sales and technical services ……
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Service & Support
SMEE provides our clients with “3R” services which are “Rapid”, “Round-the-clock” and “Reduced cost”.
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